JPH01147232U - - Google Patents
Info
- Publication number
- JPH01147232U JPH01147232U JP4090488U JP4090488U JPH01147232U JP H01147232 U JPH01147232 U JP H01147232U JP 4090488 U JP4090488 U JP 4090488U JP 4090488 U JP4090488 U JP 4090488U JP H01147232 U JPH01147232 U JP H01147232U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- vacuum container
- cylinder
- exhaust port
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4090488U JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4090488U JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147232U true JPH01147232U (en]) | 1989-10-11 |
| JPH0634368Y2 JPH0634368Y2 (ja) | 1994-09-07 |
Family
ID=31267360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4090488U Expired - Lifetime JPH0634368Y2 (ja) | 1988-03-28 | 1988-03-28 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634368Y2 (en]) |
-
1988
- 1988-03-28 JP JP4090488U patent/JPH0634368Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634368Y2 (ja) | 1994-09-07 |